Tresneria galeria
NanoGUNEko adituek kudeatzen dute eta arlo anitzetako ikerlariek erabiltzen dute.
NanoGUNEko Kanpo Zerbitzuen sailak karakterizazio eta fabrikazio zerbitzuen sorta zabala eskaintzen die industria eta akademiako kanpo erabiltzaileei.
Hemen behean, nanoGUNEren tresneria aurkezten da.
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Ion Beam Etcher (4Wave)
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Quantum Design SQUID-VSM EverCool
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X-ray reflectivity/diffractometry (X'pert PRO by PANalytical)
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Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
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Electron-Beam Lithography (Raith -150-TWO / E-line)
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Leica EM MED020 / Quorum technologies Q150 T ES
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ALD Cambridge Nanotech Savannah S100
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Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker
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UHV Sputtering System (AJA Int.)
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Magneto-Optical Kerr Effect (MOKE) microscope
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Magneto-Optical Kerr Effect (MOKE) set-up
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Quantum Design PPMS
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Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
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Four point probe
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High power industrial Picosecond Laser
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FTIR Spectrometer PerkinElmer Frontier
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ALD Beneq TFS 200
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Double Pack Oven, 650ºC UNITEMP RSO-650-200
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RAMGRABER Wet benches
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Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB)
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Electrospinning
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STM/AFM (1 K) in UHV with magnetic field
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STM/AFM (4 K) in UHV with light detection set-up
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High-resolution Transmission Electron Microscope (HRTEM)
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Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
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Mask aligner (EVG)
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Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
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UV-NIR Spectrometry
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Scattering-type near-field microscope (NeaSpec)
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FTIR Spectrometer PerkinElmer Frontier
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Spectroscopic ellipsometer (GES5 spectroscopic-ellipsometer SEMILAB)
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Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
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NIR Raman spectroscopy
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Surface Plasmon Resonance Platform
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3D Optical Profiler
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Microscopy Platform for Materials Research
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Universal mechanical tester (UMT)
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Plasma asher
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Scattering-type near-field microscope (Neaspec)
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CRYO Plasma FIB
Areto garbia
300m2-ko areto garbiak ISO 5 (Class 100) eta ISO 7 (Class 1000) klasifikazioa duten guneak ditu, eta nanofabrikazio eta nanokarakterizazio prozesuetarako erabiltzen da.
Azpiegitura eta tresneria
6 200m2 -ko aparteko azpiegitura, 300m2 -ko areto garbia eta 15 laborategi ultra-sentikor, puntako tresneriarekin hornituak.